Method of gas reaction process control
作者： Yasushi Kondo , Kenichi Ishii , Eita Kinoshita , Yutaka Hayashi
DOI:
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摘要: A method of gas reaction process control in which plasma generated a location different than at specimen is held transported to the and processing carried out. electrode with porous structure permeable provided transportation route voltage applied for adjusting surface potential so as prevent degradation due potential.
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