Charge-state-resolved ion energy distribution functions of cathodic vacuum arcs: A study involving the plasma potential and biased plasmas
作者： André Anders , Efim Oks
DOI: 10.1063/1.2561226
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摘要: Charge-state-resolved ion energy distribution functions were measured for pulsed cathodic arcs taking the sheath into account that formed between plasma and entrance of a combined mass spectrometer. An electron emitting probe was employed to independently determine potential. All results obtained by averaging over several individual measurements because instantaneous distributions potential show large amplitude fluctuations due explosive nature arc generation. It found in independent charge state. This is contrast findings with continuously operating, direct-current employ magnetic field at cathode steer spot motion. The different indicate important role steering properties arcs. are further supported experiments “biased plasmas”...
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