MEMS Force Sensor in a Flexible Substrate Using Nichrome Piezoresistors
作者： Moinuddin Ahmed , Murali M. Chitteboyina , Donald P. Butler , Zeynep Celik-Butler
DOI: 10.1109/JSEN.2013.2272881
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摘要: … with an average value of 20.47 µN for the force sensors in a … piezoresistors used in the flexible force sensors in this work was … the dynamic range of the sensors since many sensors are …
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