New patternable dielectric and optical materials for MCM-L/D- and o/e-MCM-packaging
作者： M. Robertsson , A. Dabek , G. Gustafsson , O.-J. Hagel , M. Popall
关键词:
摘要: Photopatternable inorganic-organic copolymers (ormocers, or organically modified ceramics) with negative resist behaviour have been developed and tested as thin film materials for electrical and/or optical packaging purposes, e.g. MCM-L/D optoelectronic MCM packaging. Good processability in combination a much lower post-curing temperature (120/spl deg/C-170/spl deg/C) than alternative such polyimide benzocyclobutene enables the use of low cost glass fiber reinforced polymer substrates FR-4 BT. The good electrical, other properties are presented discussed. process tentative design-rules multilayer MCM-L/Ds described some test-vehicles presented, emphasizing versatility low-cost potential new materials.
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