W-Band Power Performance of SiN-Passivated N-Polar GaN Deep Recess HEMTs

作者: Brian Romanczyk , Xun Zheng , Matthew Guidry , Haoran Li , Nirupam Hatui

DOI: 10.1109/LED.2020.2967034

关键词:

摘要: … The N-polar GaN deep recess HEMT used in this study was … GaN buffer and consisted of a 10-nm-thick Si-doped GaN layer… The W-band power performance of N-polar GaN deep recess …

参考文章(26)
Kozo Makiyama, Shirou Ozaki, Naoya Okamoto, Toshihiro Ohki, Yoshitaka Niida, Yoichi Kamada, Kazukiyo Joshin, Keiji Watanabe, S5-H7: GaN-HEMT technology for high power millimeter-wave amplifier 2014 Lester Eastman Conference on High Performance Devices (LEC). pp. 1- 4 ,(2014) , 10.1109/LEC.2014.6951571
D. BUTTARI, A. CHINI, A. CHAKRABORTY, L. MCCARTHY, H. XING, T. PALACIOS, L. SHEN, S. KELLER, U. K. MISHRA, SELECTIVE DRY ETCHING OF GaN OVER AlGaN IN BCL3/SF6 MIXTURES International Journal of High Speed Electronics and Systems. ,vol. 14, pp. 756- 761 ,(2004) , 10.1142/S012915640400279X
D. F. Brown, A. Williams, K. Shinohara, A. Kurdoghlian, I. Milosavljevic, P. Hashimoto, R. Grabar, S. Burnham, C. Butler, P. Willadsen, M. Micovic, W-band power performance of AlGaN/GaN DHFETs with regrown n+ GaN ohmic contacts by MBE international electron devices meeting. ,(2011) , 10.1109/IEDM.2011.6131584
Diego Marti, Stefano Tirelli, Valeria Teppati, Lorenzo Lugani, Jean-Francois Carlin, Marco Malinverni, Nicolas Grandjean, C. R. Bolognesi, 94-GHz Large-Signal Operation of AlInN/GaN High-Electron-Mobility Transistors on Silicon With Regrown Ohmic Contacts IEEE Electron Device Letters. ,vol. 36, pp. 17- 19 ,(2015) , 10.1109/LED.2014.2367093
B.M. Green, K.K. Chu, E.M. Chumbes, J.A. Smart, J.R. Shealy, L.F. Eastman, The effect of surface passivation on the microwave characteristics of undoped AlGaN/GaN HEMTs IEEE Electron Device Letters. ,vol. 21, pp. 268- 270 ,(2000) , 10.1109/55.843146
Ruediger Quay, A. Tessmann, R. Kiefer, S. Maroldt, C. Haupt, U. Nowotny, R. Weber, H. Massler, D. Schwantuschke, M. Seelmann-Eggebert, A. Leuther, M. Mikulla, O. Ambacher, Dual-Gate GaN MMICs for MM-Wave Operation IEEE Microwave and Wireless Components Letters. ,vol. 21, pp. 95- 97 ,(2011) , 10.1109/LMWC.2010.2099212
S.R. Bahl, J.A. del Alamo, A new drain-current injection technique for the measurement of off-state breakdown voltage in FETs IEEE Transactions on Electron Devices. ,vol. 40, pp. 1558- 1560 ,(1993) , 10.1109/16.223723
R. Vetury, N.Q. Zhang, S. Keller, U.K. Mishra, The impact of surface states on the DC and RF characteristics of AlGaN/GaN HFETs IEEE Transactions on Electron Devices. ,vol. 48, pp. 560- 566 ,(2001) , 10.1109/16.906451
M. Micovic, A. Kurdoghlian, A. Margomenos, D. F. Brown, K. Shinohara, S. Burnham, I. Milosavljevic, R. Bowen, A.J. Williams, P. Hashimoto, R. Grabar, C. Butler, A. Schmitz, P. J. Willadsen, D. H. Chow, 92–96 GHz GaN power amplifiers international microwave symposium. pp. 1- 3 ,(2012) , 10.1109/MWSYM.2012.6259572
D. Schwantuschke, P. Bruckner, A. Tessmann, F. E. van Vliet, T. Narhi, S. Muller, H. Massler, M. van Heijningen, M. Rodenburg, R. Quay, W-band power amplifier MMIC with 400 mW output power in 0.1 µm AlGaN/GaN technology european microwave integrated circuit conference. pp. 135- 138 ,(2012)