Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy
作者： Arnaud Le Febvrier , Jens Jensen , Per Eklund
DOI: 10.1116/1.4975595
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摘要: The effect of the wet-cleaning process using solvents and detergent on surface chemistry MgO(001) substrate for film deposition was investigated. Six different processes solvent were compared. growth studied by example system ScN. cleaned x-ray photoelectron spectroscopy film/substrate interface after investigated time-of-flight secondary ion mass spectroscopy. composition is dependent process. Sonication in a before yield pure oxide compared to hydroxide/carbonate contaminated all other processes. An annealing step efficient removal carbon contamination as well most hydroxide or carbonates. study revealed that significantly affects final quality. with followed cleaning exhibited cleanest annealing, addition sharpest interface.The de...
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Ping Liu, Tom Kendelewicz, Gordon E. Brown, George A. Parks, Reaction of water with MgO(100) surfaces. Part I : Synchrotron X-ray photoemission studies of low-defect surfaces Surface Science. ,vol. 412, pp. 287- 314 ,(1998) , 10.1016/S0039-6028(98)00444-0
Sit Kerdsongpanya, Ngo Van Nong, Nini Pryds, Agnė Žukauskaitė, Jens Jensen, Jens Birch, Jun Lu, Lars Hultman, Gunilla Wingqvist, Per Eklund, Anomalously high thermoelectric power factor in epitaxial ScN thin films Applied Physics Letters. ,vol. 99, pp. 232113- ,(2011) , 10.1063/1.3665945
Sangsub Kim, Sunggi Baik, Rutherford Backscattering and Channeling Studies of Cleaved, Polished, and Annealed MgO (100) Single Crystals Journal of the American Ceramic Society. ,vol. 77, pp. 230- 234 ,(1994) , 10.1111/J.1151-2916.1994.TB06982.X
Damien Cornu, Hazar Guesmi, Jean-Marc Krafft, Hélène Lauron-Pernot, Lewis Acido-Basic Interactions between CO2 and MgO Surface: DFT and DRIFT Approaches Journal of Physical Chemistry C. ,vol. 116, pp. 6645- 6654 ,(2012) , 10.1021/JP211171T
O Robach, G Renaud, A Barbier, Very-high-quality MgO(001) surfaces: roughness, rumpling and relaxation Surface Science. ,vol. 401, pp. 227- 235 ,(1998) , 10.1016/S0039-6028(97)01082-0
JL Schroeder, Arni Sigurdur Ingason, Johanna Rosén, Jens Birch, Beware of poor-quality MgO substrates: A study of MgO substrate quality and its effect on thin film quality Journal of Crystal Growth. ,vol. 420, pp. 22- 31 ,(2015) , 10.1016/J.JCRYSGRO.2015.03.010
HD Li, XN Zhang, Z Zhang, ZX Mei, XL Du, QK Xue, None, Epitaxial growth of CaO films on MgO(001) surface: Strain relaxation at the CaO∕MgO heterointerface Journal of Applied Physics. ,vol. 102, pp. 046103- ,(2007) , 10.1063/1.2770826
Russell V. Smilgys, Steven W. Robey, C. K. Chiang, T. J. Hsieh, Reactive coevaporation of DyBaCuO superconducting films: The segregation of bulk impurities on annealed MgO(100) substrates Journal of Vacuum Science and Technology. ,vol. 11, pp. 1361- 1366 ,(1993) , 10.1116/1.578554
E. M. Artem’ev, A. S. Komalov, Influence of MgO substrate treatment on the structure-sensitive properties of epitaxial films (by the example of iron films) Technical Physics. ,vol. 53, pp. 1629- 1630 ,(2008) , 10.1134/S1063784208120165
M Rickart, B.F.P Roos, T Mewes, J Jorzick, S.O Demokritov, B Hillebrands, Morphology of epitaxial metallic layers on MgO substrates: influence of submonolayer carbon contamination Surface Science. ,vol. 495, pp. 68- 76 ,(2001) , 10.1016/S0039-6028(01)01504-7