Free-acid containing polymers and their use in photoresists
作者： Ilya Rushkin , Art Medina , Sanjay Malik , Gregory Spaziano , David Brzozowy
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摘要: An improved binder resist for use in radiation sensitve photoresist compositions comprises a polymer having monomeric units of (a) carboxylic anhydride units, (b) alkenyl silane and (c) containing an acid labile group, wherein the contains from about 1 to 3 mol % free is provided either by presence futher unit acids groups or hydrolysis sufficient unit.
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