Ge-doped SiO2 glass films prepared by plasma enhanced chemical vapor deposition for planar waveguides
作者： Jeong Woo Lee , Sang Sub Kim , Byung-Taek Lee , Jong Ha Moon
DOI: 10.1016/J.APSUSC.2004.01.013
关键词:
摘要: … For a successful fabrication of PLC, a precise control of the … appears of importance in order to expedite their use in PLC. … layer in PLC waveguides by fabricating a channel waveguide …
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