The tribology behaviors of textured graphite-like carbon film under air and aqueous environments

作者: Lei Shi , Zhonghui Zhang , Mengde Liao , Chunyu Zhou , Chufeng Sun

DOI: 10.1088/2051-672X/AB2AA0

关键词:

摘要: The pattern of micropore with various diameters (0, 0.5, 1.5 and 5 μm) on the surface of single crystal silicon was obtained through laser treatment and then the graphite-like carbon (GLC) film was deposited on these substrates through magnetron sputtering technology. The effect of micropore diameter on tribological performance of GLC film under air and aqueous environments was systematically investigated. The results indicated that the micropore diameter and test environment greatly affected the tribological behavior of GLC film. The …

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