Portable apparatus and method for treating a workpiece
作者： Seyed Farhad Miralai , John Andrew Mcdaniel , Saswati Datta , Vesselin Nikolov Shanov
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摘要: A plasma generating apparatus and method for treating a surface of workpiece. This comprises power supply (100), at least one powerable electrode connected to the groundable ground, dielectric separating electrode, chamber partially housing both first inlet admitting gas into such that can flow between electrode. The are disposed in an array. These electrodes arranged be on common side workpiece, provide portable apparatus.
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