Fabry-Perot metrology for displacements up to 50 mm.
作者： John R. Lawall
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摘要: A system designed to apply Fabry–Perot interferometry the measurement of displacements is described. Two adjacent modes a cavity are probed, and both absolute optical frequencies their difference used determine via changes in length. Light coupled an fiber, making ideal for remote sensing applications. Continuous interrogation not necessary, as length encoded free spectral range. The uncertainty determined be below 10 pm, which largest displacement measured corresponds relative 4×10−10. To my knowledge this smallest ever demonstrated.
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Lowell Howard, Jack Stone, Joe Fu, Real-time displacement measurements with a Fabry-Perot cavity and a diode laser Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology. ,vol. 25, pp. 321- 335 ,(2001) , 10.1016/S0141-6359(01)00086-1
Thomas J. Dunn, Absolute distance measurement interferometry for alignment systems for advanced lithography tools Journal of Vacuum Science & Technology B. ,vol. 14, pp. 3960- 3963 ,(1996) , 10.1116/1.588623
H. Kogelnik, T. Li, Laser beams and resonators Proceedings of the IEEE. ,vol. 54, pp. 1312- 1329 ,(1966) , 10.1109/PROC.1966.5119
N Bobroff, Recent advances in displacement measuring interferometry Measurement Science and Technology. ,vol. 4, pp. 907- 926 ,(1993) , 10.1088/0957-0233/4/9/001
John Lawall, J. Marc Pedulla, Yann Le Coq, Ultrastable laser array at 633 nm for real-time dimensional metrology Review of Scientific Instruments. ,vol. 72, pp. 2879- 2888 ,(2001) , 10.1063/1.1374600
Richard D. Deslattes, Albert Henins, X-Ray to Visible Wavelength Ratios Physical Review Letters. ,vol. 31, pp. 972- 975 ,(1973) , 10.1103/PHYSREVLETT.31.972
Wei-Tou Ni, Der-Kuang Liu, Tai-Tung Liu, Hsien-Hao Mei, Sheau-shi Pan, Chin-Poh Pang, Hsien-Chi Yeh, None, The application of laser metrology and resonant optical cavity techniques to the measurement of G Measurement Science and Technology. ,vol. 10, pp. 495- 498 ,(1999) , 10.1088/0957-0233/10/6/314
John Lawall, Ernest Kessler, Design and evaluation of a simple ultralow vibration vacuum environment Review of Scientific Instruments. ,vol. 73, pp. 209- 215 ,(2002) , 10.1063/1.1416110
John Lawall, Interferometry for Accurate Displacement Metrology Optics & Photonics News. ,vol. 15, pp. 40- 45 ,(2004) , 10.1364/OPN.15.10.000040
R. W. P. Drever, J. L. Hall, F. V. Kowalski, J. Hough, G. M. Ford, A. J. Munley, H. Ward, Laser phase and frequency stabilization using an optical resonator Applied Physics B. ,vol. 31, pp. 97- 105 ,(1983) , 10.1007/BF00702605