Constructions comprising hafnium oxide and/or zirconium oxide
作者： David Korn , F. Daniel Gealy , Noel Rocklein , Cancheepuram V. Srividya , John Vernon
DOI:
关键词:
摘要: The invention includes ALD-type methods in which two or more different precursors are utilized with one reactants to form a material. In particular aspects, the hafnium and aluminum, only reactant is ozone, material oxide predominantly tetragonal crystalline phase.
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