作者: Masayuki Azuma , Yasuyuki Sakaya , Yuichi Kubo , Masateru Osada , Yuusuke Arai
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摘要: An adhesive sheet (S) is expanded by an expanding mechanism ( 20 ) with a plate-like article (W) being mounted to frame (F) after dicing of the increase spacings between individual chips (T), state maintained expansion maintaining device 10 ), so that able be conveyed together (T) maintained, thereby preventing adjacent from interfering each other during conveyance. This allows (W), dicing, without edges coming into contact vibration conveyance, avoiding causing chipping or microcracks in edges.