Bonded piezoelectric transducers for frequencies beyond 100MHz

摘要: Abstract Sonic devices requiring a large fractional band-width, such as delay lines, light deflectors etc., can be given low insertion loss if transducers with high electro-mechanical coupling factor are used. Such yet unobtainable by thin-film deposition methods. However, recently developed bonding and precision machining techniques, performance made various ceramic single-crystal materials. Epoxy has been useful up to 100MHz, but intermediate indium films in combination additional metal layers is shown have potential for operating 1GHz.