Effect of annealing on the composition, structure and mechanical properties of carbon nitride films deposited by middle-frequency magnetron sputtering
作者： Z.H. Huang , B. Yang , C.S. Liu , L.P. Guo , X.J. Fan
DOI: 10.1016/J.MATLET.2006.11.127
关键词:
摘要: Abstract Carbon nitride films were deposited by middle-frequency reactive magnetron sputtering and annealed at different temperatures in nitrogen ambient. X-ray photoelectron spectroscopy, Raman scattering, transmission electron microscopy, nano-indenter used to characterize the as-deposited films. The analysis showed that annealing resulted dissociation of N C happened after 500 °C lagged behind N. With increase temperature, disorder sp 2 decreased gradually graphitized. microstructure changed from amorphous fullerene-like CN x with temperature increasing 500 °C, then nitridized graphite nanocrystals 600 °C. graphitization a drastic decreasing hardness modulus
elsevier.com
sci-hub.se 参考文章(16)
Amy Y. Liu, Marvin L. Cohen, Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4 Physical Review B. ,vol. 41, pp. 10727- 10734 ,(1990) , 10.1103/PHYSREVB.41.10727
En-Ge Wang, A new development in covalently bonded carbon nitride and related materials Advanced Materials. ,vol. 11, pp. 1129- 1133 ,(1999) , 10.1002/(SICI)1521-4095(199909)11:13<1129::AID-ADMA1129>3.0.CO;2-9
Liudi Jiang, A.G. Fitzgerald, M.J. Rose, The effect of postdeposition annealing on chemical bonding in amorphous carbon nitride films prepared by dc magnetron sputtering Applied Surface Science. ,vol. 181, pp. 331- 338 ,(2001) , 10.1016/S0169-4332(01)00427-5
Z.W. Deng, R. Souda, Synthesis and thermal decomposition of carbon nitride films prepared by nitrogen ion implantation into graphite Thin Solid Films. ,vol. 406, pp. 46- 53 ,(2002) , 10.1016/S0040-6090(01)01785-0
Wentao Xu, Toshiyuki Fujimoto, Li Wang, Tadayuki Ohchi, Isao Kojima, What happens in the annealing of carbon nitride thin films Journal of Vacuum Science & Technology B. ,vol. 22, pp. 6- 11 ,(2004) , 10.1116/1.1631293
J Robertson, Diamond-like amorphous carbon Materials Science & Engineering R-reports. ,vol. 37, pp. 129- 281 ,(2002) , 10.1016/S0927-796X(02)00005-0
F. Alvarez, N. M. Victoria, P. Hammer, F. L. Freire, M. C. dos Santos, Infrared analysis of deuterated carbon-nitrogen films obtained by dual-ion-beam-assisted-deposition Applied Physics Letters. ,vol. 73, pp. 1065- 1067 ,(1998) , 10.1063/1.122115
J. Neidhardt, Zs. Czigány, I. F. Brunell, L. Hultman, Growth of fullerene-like carbon nitride thin solid films by reactive magnetron sputtering; role of low-energy ion irradiation in determining microstructure and mechanical properties Journal of Applied Physics. ,vol. 93, pp. 3002- 3015 ,(2003) , 10.1063/1.1538316
F.Z Cui, D.J Li, A review of investigations on biocompatibility of diamond-like carbon and carbon nitride films Surface & Coatings Technology. ,vol. 131, pp. 481- 487 ,(2000) , 10.1016/S0257-8972(00)00809-4
C. Niu, Y. Z. Lu, C. M. Lieber, Experimental Realization of the Covalent Solid Carbon Nitride Science. ,vol. 261, pp. 334- 337 ,(1993) , 10.1126/SCIENCE.261.5119.334