System and method for forming a buried lower electrode in conjunction with an encapsulated mems device
作者： Gary O'brien , Andrew B. Graham , Ando Feyh
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摘要: A system and method for forming a sensor device with buried first electrode includes providing silicon portion an layer second layer. The the are adjoined along common oxide formed on of portion. resulting multi-silicon stack lower that is further defined by layer, highly-doped ion implanted region, or combination thereof. has plurality layers dioxide electrically isolated regions in each allowing both upper electrode. spacer enables to be accessible from topside device.
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