Thermal bridge for chemical vapor deposition reactors

摘要: A thermal bridge connecting first and second processing zones a method for transferring work piece from to zone by way of the are disclosed. piece, transportable on or above bridge, is maintained at temperature between temperatures zones. The member features thermally conductive transport supported over an infrared transmissive that insulative heat conduction convection. extends reactors. An radiation beam source emits which passes through member, heating member. In alternate embodiment, may be heated directly. liner mounted retain heat.