Corrosion resistant molybdenum mask
作者： Peter Henry Berasi , Hsing Hsiung Chen
DOI:
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摘要: A molybdenum mask for use in the sputter deposition of electrically conductive materials on preselected areas a substrate is coated with transition metal carbide. The carbide protects images defined from degradation during cleaning and related processes, thereby dramatically extending usable service life mask. present invention overcomes problem reduced used coating similar evaporative processing.
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