RF 마그네트론 스퍼터링 방법으로 SiO2/Si(100)기판위에 성장시킨 ZnO 박막의 구조 및 광특성
作者： Seok Kyu Han , Soon-Ku Hong , Hyo-Jin Kim , Jae-Wook Lee , Jeong-Yong Lee
DOI: 10.3740/MRSK.2006.16.6.360
关键词: Materials science 、 Optoelectronics
摘要:
cheric.org参考文章(15)
Deuk-Kyu Hwang, Kyu-Hyun Bang, Min-Chang Jeong, Jae-Min Myoung, Effects of RF power variation on properties of ZnO thin films and electrical properties of p n homojunction Journal of Crystal Growth. ,vol. 254, pp. 449- 455 ,(2003) , 10.1016/S0022-0248(03)01205-3
Yuantao Zhang, Guotong Du, Dali Liu, Xinqiang Wang, Yan Ma, Jinzhong Wang, Jingzhi Yin, Xiaotian Yang, Xiaoke Hou, Shuren Yang, Crystal growth of undoped ZnO films on Si substrates under different sputtering conditions Journal of Crystal Growth. ,vol. 243, pp. 439- 443 ,(2002) , 10.1016/S0022-0248(02)01569-5
S. K. Hong, Y. Chen, H. J. Ko, H. Wenisch, T. Hanada, T. Yao, ZnO and related materials: Plasma-Assisted molecular beam epitaxial growth, characterization and application Journal of Electronic Materials. ,vol. 30, pp. 647- 658 ,(2001) , 10.1007/BF02665850
Takahiro Matsumoto, Hiroyuki Kato, Kazuhiro Miyamoto, Michihiro Sano, Evgeniy A. Zhukov, Takafumi Yao, Correlation between grain size and optical properties in zinc oxide thin films Applied Physics Letters. ,vol. 81, pp. 1231- 1233 ,(2002) , 10.1063/1.1499991
Toru Aoki, Yoshinori Hatanaka, David C. Look, ZnO diode fabricated by excimer-laser doping Applied Physics Letters. ,vol. 76, pp. 3257- 3258 ,(2000) , 10.1063/1.126599
David B. Laks, Chris G. Van de Walle, G. F. Neumark, Sokrates T. Pantelides, Acceptor doping in ZnSe versus ZnTe Applied Physics Letters. ,vol. 63, pp. 1375- 1377 ,(1993) , 10.1063/1.109681
Li-Jian Meng, M.P. dos Santos, Direct current reactive magnetron sputtered zinc oxide thin films —the effect of the sputtering pressure Thin Solid Films. ,vol. 250, pp. 26- 32 ,(1994) , 10.1016/0040-6090(94)90159-7
Satoshi Masuda, Ken Kitamura, Yoshihiro Okumura, Shigehiro Miyatake, Hitoshi Tabata, Tomoji Kawai, Transparent thin film transistors using ZnO as an active channel layer and their electrical properties Journal of Applied Physics. ,vol. 93, pp. 1624- 1630 ,(2003) , 10.1063/1.1534627
Y.M. Lu, W.S. Hwang, W.Y. Liu, J.S. Yang, Effect of RF power on optical and electrical properties of ZnO thin film by magnetron sputtering Materials Chemistry and Physics. ,vol. 72, pp. 269- 272 ,(2001) , 10.1016/S0254-0584(01)00450-3
Hyoun Woo Kim, Nam Ho Kim, Structural studies of room-temperature RF magnetron sputtered ZnO films under different RF powered conditions Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 103, pp. 297- 302 ,(2003) , 10.1016/S0921-5107(03)00281-2