Structure and process for a capacitor and other devices
作者： Chaw Sing Ho , Chit Hwei Ng
DOI:
关键词: Electrical engineering 、 Semiconductor structure 、 Layer (electronics) 、 Capacitor 、 Fabrication 、 Process (computing) 、 Optoelectronics 、 Dielectric layer 、 Resistor 、 Materials science 、 Electrical conductor
摘要: A structure and method of fabrication a capacitor other devices by providing semiconductor top insulating layer conductive features over the structure; forming first layer; patterning to form at least bottom plate portion dielectric second section on layer. The embodiment can further comprise in that underlie plate, or/and section. resistors, capacitors or devices.
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