Thin-film capacitors and methods for forming the same
作者： Arjun Kar Roy
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摘要: An improved thin-film capacitor and methods for forming the same on a surface of substrate are disclosed. The includes bottom conducting plate formed by depositing conductive material within trench an insulating layer planarizing layers. A dielectric film is then deposited surface, such that at least portion remains over plate. second substrate, patterned etched resides material.
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