Effects of Post-Annealing Temperatures and Ambient Atmospheres on the Electrical Properties of Ultrathin (Ba,Sr)TiO3 Capacitors
作者： Po-ching Chen , Hiroshi Miki , Yasuhiro Shimamoto , Yuichi Matsui , Masahiko Hiratani
DOI: 10.1143/JJAP.37.5112
关键词: Capacitance 、 Tin 、 Film capacitor 、 Materials science 、 Electrode 、 Capacitor 、 Analytical chemistry 、 Platinum 、 Biasing 、 Annealing (metallurgy)
摘要: Ultrathin (Ba,Sr)TiO3 (BST) film capacitors with a Pt/Ba0.5Sr0.5TiO3(30 nm)/Pt/TiN/Si structure were fabricated. To investigate the effects of annealing temperatures, annealed in flowing Ar or O2 at temperatures ranging from 400°C to 600°C for 30 min. The electrical properties samples strongly dependent on temperatures. In 500°C (in and O2) 550°C O2), leakage current decreased level 10-8 A/cm2 when bias voltage was ±1.5 V. as-deposited sample, maximum capacitance appeared -1 However, increased zero after annealing. These phenomena are believed be defect-related (due oxygen vacancies). atmospheres also found have an effect preserving morphology Pt electrodes.
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jsap.jp参考文章(3)
Cheol Seong Hwang, Soon Oh Park, Chang Seok Kang, Hag-Ju Cho, Ho-Kyu Kang, Sung Tae Ahn, Moon Yong Lee, Deposition and Electrical Characterization of Very Thin SrTiO3 Films for Ultra Large Scale Integrated Dynamic Random Access Memory Application Japanese Journal of Applied Physics. ,vol. 34, pp. 5178- 5183 ,(1995) , 10.1143/JJAP.34.5178
L. A. Knauss, J. M. Pond, J. S. Horwitz, D. B. Chrisey, C. H. Mueller, Randolph Treece, The effect of annealing on the structure and dielectric properties of BaxSr1−xTiO3 ferroelectric thin films Applied Physics Letters. ,vol. 69, pp. 25- 27 ,(1996) , 10.1063/1.118106
Robert Tsu, Hung-Yu Liu, Wei-Yung Hsu, Scott Summerfelt, Katsuhiro Aoki, Bruce Gnade, Correlations of Ba1−xSrxTiO3 Materials and Dielectric Properties MRS Proceedings. ,vol. 361, ,(1994) , 10.1557/PROC-361-275