作者: Luke A. Dunlop , Ahmed Kursumovic , Judith L. MacManus-Driscoll
DOI: 10.1021/CG901384D
关键词: Mineralogy 、 Indium 、 Oxide 、 Nanocomposite thin films 、 Chemical engineering 、 Materials science 、 Indium tin oxide 、 Crystallite
摘要: Polycrystalline tin-doped indium oxide (ITO) films were deposited at growth rates up to 0.8 nm/s on glass using pulsed nebulization CVD. The precursor solutions nebulized into droplets with a ...