Semiconductor capacitive element, method for manufacturing same and semiconductor device provided with same
作者： Ken Ozawa
DOI:
关键词: Spark plug 、 Electrical engineering 、 Capacitor 、 Materials science 、 Electrode 、 Dielectric 、 Semiconductor 、 Semiconductor device 、 Capacitive sensing 、 Etching 、 Optoelectronics
摘要: A semiconductor capacitor configured so as to use buried wirings, electrodes, formed in an interlayer dielectric is provided on a substrate which capable of preventing increase number manufacturing processes with occurrence parasitic capacity being suppressed. The has capacitive insulating film made up etching stopper only region sandwiched between via plug serving upper electrode and lower electrode, the not other than facing region.
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