The study of mechanical properties of a-C:H films by Brillouin scattering and ultralow load indentation
作者： X. Jiang , J. W. Zou , K. Reichelt , P. Grünberg
DOI: 10.1063/1.343833
关键词: Diamond 、 Young's modulus 、 Surface phonon 、 Shear modulus 、 Optics 、 Materials science 、 Brillouin scattering 、 Poisson's ratio 、 Amorphous solid 、 Indentation 、 Composite material
摘要: In this study diamondlike a‐C:H films have been prepared by different methods: our first experiment were deposited plasma decomposition of methane at bias voltages. the second with high hardness implanted 400‐keV C+ ions and doses between 1013 1017 ions/cm2 . Subsequently, following mechanical properties measured: The shear modulus μ frequency surface phonon (Rayleigh wave), stiffness S an ultralow load indentation diamond. Young’s Poisson’s ratio calculated from S. internal stress σ was determined bending beam method. From E σ, average strain e has calculated. behavior it concluded that a phase transition amorphous to graphitelike occurred increasing substrate voltage.
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(18)
J. W. Zou, K. Reichelt, K. Schmidt, B. Dischler, The deposition and study of hard carbon films Journal of Applied Physics. ,vol. 65, pp. 3914- 3918 ,(1989) , 10.1063/1.343355
C.-P. Chou, L.A. Davis, M.C. Narasimhan, Elastic constants of metallic glasses Scripta Metallurgica. ,vol. 11, pp. 417- 423 ,(1977) , 10.1016/0036-9748(77)90280-0
J. L. Loubet, J. M. Georges, O. Marchesini, G. Meille, Vickers Indentation Curves of Magnesium Oxide (MgO) Journal of Tribology-transactions of The Asme. ,vol. 106, pp. 43- 48 ,(1984) , 10.1115/1.3260865
A. Kueny, M. Grimsditch, Surface waves in a layered material Physical Review B. ,vol. 26, pp. 4699- 4702 ,(1982) , 10.1103/PHYSREVB.26.4699
B. Goranchev, K. Schmidt, K. Reichelt, Compressive stress of thin cubic BN films prepared by r.f. reactive sputtering on r.f.-biased substrates Thin Solid Films. ,vol. 149, ,(1987) , 10.1016/0040-6090(87)90256-2
C. Weissmantel, K. Bewilogua, D. Dietrich, H.-J. Erler, H.-J. Hinneberg, S. Klose, W. Nowick, G. Reisse, Structure and properties of quasi-amorphous films prepared by ion beam techniques☆ Thin Solid Films. ,vol. 72, pp. 19- 32 ,(1980) , 10.1016/0040-6090(80)90554-4
B. Hillebrands, P. Baumgart, R. Mock, G. Güntherodt, P. S. Bechthold, Dispersion of localized elastic modes in thin supported gold layers measured by Brillouin scattering Journal of Applied Physics. ,vol. 58, pp. 3166- 3168 ,(1985) , 10.1063/1.335822
J. W. Zou, K. Schmidt, K. Reichelt, B. Stritzker, The effect of heavy‐ion bombardment on the properties of hard a‐C:H (i‐C) films Journal of Vacuum Science and Technology. ,vol. 6, pp. 3103- 3104 ,(1988) , 10.1116/1.575481
G. B. Benedek, K. Fritsch, Brillouin Scattering in Cubic Crystals Physical Review. ,vol. 149, pp. 647- 662 ,(1966) , 10.1103/PHYSREV.149.647
A F Jankowski, T Tsakalakos, The effect of strain on the elastic constants of noble metals Journal of Physics F: Metal Physics. ,vol. 15, pp. 1279- 1292 ,(1985) , 10.1088/0305-4608/15/6/013