Mechanism for coarsening of P-mediated Ge quantum dots during in-situ annealing

作者: J. Qin , F.H. Li , Y.Q. Wu , H.B. Yang , Y.L. Fan

DOI: 10.1016/J.SUSC.2006.11.034

关键词: Molecular beam epitaxyAtomSiliconGermaniumIsotropic etchingAnnealing (metallurgy)Chemical physicsCrystallographyQuantum dotMaterials scienceRaman spectroscopySurfaces, Coatings and FilmsSurfaces and InterfacesCondensed matter physicsMaterials Chemistry

摘要: … In this paper, the coarsening of phosphorus-mediated Ge QD during in-situ annealing is studied. We found that the rapid dot coarsening at the beginning of in-situ annealing is mainly …

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