Summary of ISO/TC 201 standard: XVIII, ISO 19318:2004—surface chemical analysis—X‐ray photoelectron spectroscopy—Reporting of methods used for charge control and charge correction

摘要: X-ray photoelectron spectroscopy (XPS) is widely used for characterization of surfaces materials. Elements in the sample (with exception hydrogen and helium) are identified from comparisons binding energies their core levels, determined measured spectra, with tabulated values these various elements. Information on chemical state detected elements can frequently be obtained small variations (typically between 0.1 eV 10 eV) core-level corresponding pure Reliable determination shifts often requires that binding-energy scale XPS instrument calibrated an uncertainty could as eV. The surface potential insulating specimen will generally change during measurement due to charging, it then difficult determine accuracy needed elemental identification or chemical-state determination. There two steps dealing this problem. First, experimental taken minimize amount charging (charge-control methods). Second, corrections effects made after acquisition data (charge-correction Although buildup ofmore » charge complicate analysis some circumstances, creatively a tool gain information about specimen.« less