Al intermediate oxidation states observed by core level photoemission spectroscopy

作者: G. Faraci , S. La Rosa , A. R. Pennisi , Y. Hwu , G. Margaritondo

DOI: 10.1063/1.359866

关键词: OxideOverlayerX-ray photoelectron spectroscopyPhotoemission spectroscopySubstrate (electronics)Binding energyOxidation stateDeposition (law)Materials scienceAnalytical chemistry

摘要: Aluminum oxidation states in stoichiometric or substoichiometric configuration are studied by core level photoemission spectroscopy on different substrates (SiO2, graphite). They compared with recent results reported for the interface Si–Aln+O. Three Al have been identified and their space distribution (binding energy, intensity, width) is determined region from substrate up to surface of a thick overlayer. The Al2+–O intermediate state shown be confined at interface; contrary, Al1+–O oxide (alumina) present beyond region. From attenuation peak, deposition morphology length photoelectrons deduced.

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