Self-aligned gated field emission devices using single carbon nanofiber cathodes

作者: MA Guillorn , Anatoli Vasilievich Melechko , Vladimir I Merkulov , Dale K Hensley , Michael L Simpson

DOI: 10.1063/1.1517718

关键词: OptoelectronicsNanotechnologyApertureField electron emissionChemical-mechanical planarizationFabricationCarbon nanofiberMaterials scienceCarbon nanotubeCathodeCommon emitter

摘要: We report on the fabrication and operation of integrated gated field emission devices using single vertically aligned carbon nanofiber (VACNF) cathodes where gate aperture has been formed a self-aligned technique based chemical mechanical polishing. find that this method for producing cathode easily achieves structures with apertures order 2 μm show good concentric alignment to VACNF emitter. The these was explored characteristics fit well Fowler–Nordheim model demonstrated.

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