State-of-the-art in integrated optical microspectrometers

作者: R.F. Wolffenbuttel

DOI: 10.1109/TIM.2003.821490

关键词: Materials scienceSpectral resolutionOptoelectronicsMicrosystemMicroelectromechanical systemsSiliconInfraredSurface micromachiningOptical pathSignal conditioningElectronic engineering

摘要: Microspectrometers fabricated in silicon using microelectromechanical systems technologies are versatile microinstruments: small, lightweight, and featuring a demonstrated capability for spectral analysis. When realized process compatible technologies, low-cost batch fabrication of an intelligent optoelectronic system-on-a-chip is feasible by cointegration optics with microelectronic circuits. However, the resolution devices presented so far has been limited to about R=15, which does restrict application. This paper provides overview microspectrometers operating visible infrared range. Moreover, it that primarily due short optical path inherent microsystem, properties IC-process materials, lack adequate signal conditioning.

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