关键词: Materials science 、 Spectral resolution 、 Optoelectronics 、 Microsystem 、 Microelectromechanical systems 、 Silicon 、 Infrared 、 Surface micromachining 、 Optical path 、 Signal conditioning 、 Electronic engineering
摘要: Microspectrometers fabricated in silicon using microelectromechanical systems technologies are versatile microinstruments: small, lightweight, and featuring a demonstrated capability for spectral analysis. When realized process compatible technologies, low-cost batch fabrication of an intelligent optoelectronic system-on-a-chip is feasible by cointegration optics with microelectronic circuits. However, the resolution devices presented so far has been limited to about R=15, which does restrict application. This paper provides overview microspectrometers operating visible infrared range. Moreover, it that primarily due short optical path inherent microsystem, properties IC-process materials, lack adequate signal conditioning.