Fast Atom Beam- and Vacuum-Ultraviolet-Activated Sites for Low-Temperature Hybrid Integration
作者： Hong-Wei Yang , C. Robert Kao , Akitsu Shigetou
DOI: 10.1021/ACS.LANGMUIR.7B02010
关键词:
摘要: The evolution of surface chemical structures polyimide induced by Ar fast atom beam (Ar-FAB) bombardment and vacuum ultraviolet (VUV) irradiation was investigated using X-ray photoelectron spectroscopy (XPS) to clarify the activated sites for low-temperature hybrid bonding. These in molecular chains are considered corresponding bonding sites. They affect interfacial properties. Therefore, such analyses necessary optimize processing parameters different surface-modification methods. XPS results demonstrated that Ar-FAB physical transformed into benzene-dominant structures, whereas effect VUV located at side chain groups as ether carbonyl, resulting much longer fragments (i.e., less matrix damage). Moreover, calculated thickness VUV-induced modification layer grew around 0.6 nm its maximum.
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sci-hub.se 参考文章(18)
Akitsu Shigetou, Jun Mizuno, Shuichi Shoji, Vacuum ultraviolet (VUV) and vapor-combined surface modification for hybrid bonding of SiC, GaN, and Si substrates at low temperature and atmospheric pressure electronic components and technology conference. pp. 1498- 1501 ,(2015) , 10.1109/ECTC.2015.7159796
Karen Derendorf, Stephanie Essig, Eduard Oliva, Vera Klinger, Tobias Roesener, Simon P. Philipps, Jan Benick, Martin Hermle, Michael Schachtner, Gerald Siefer, Wolfgang Jager, Frank Dimroth, Fabrication of GaInP/GaAs//Si Solar Cells by Surface Activated Direct Wafer Bonding IEEE Journal of Photovoltaics. ,vol. 3, pp. 1423- 1428 ,(2013) , 10.1109/JPHOTOV.2013.2273097
Janez Megusar, Low temperature fast-neutron and gamma irradiation of Kapton® polyimide films Journal of Nuclear Materials. ,vol. 245, pp. 185- 190 ,(1997) , 10.1016/S0022-3115(97)00012-3
S. Contarini, J.A. Schultz, S. Tachi, Y.S. Jo, J.W. Rabalais, Ion bombardment induced decomposition of polyimide (PIQ) studied by X-ray Photoelectron Spectroscopy (XPS) and Direct Recoil (DR) spectrometry Applied Surface Science. ,vol. 28, pp. 291- 301 ,(1987) , 10.1016/0169-4332(87)90130-9
A G P Kottapalli, M Asadnia, J M Miao, G Barbastathis, M S Triantafyllou, A flexible liquid crystal polymer MEMS pressure sensor array for fish-like underwater sensing Smart Materials and Structures. ,vol. 21, pp. 115030- ,(2012) , 10.1088/0964-1726/21/11/115030
Nobuyuki Takahashi, Do Y. Yoon, William Parrish, Molecular order in condensed states of semiflexible poly(amic acid) and polyimide Macromolecules. ,vol. 17, pp. 2583- 2588 ,(1984) , 10.1021/MA00142A021
A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek, O. Chernyayeva, J.W. Sobczak, EUV-induced physico-chemical changes in near-surface layers of polymers Journal of Electron Spectroscopy and Related Phenomena. ,vol. 184, pp. 270- 275 ,(2011) , 10.1016/J.ELSPEC.2010.12.030
Robert P Winarski, David L Ederer, Ernst Z Kurmaev, SN Shamin, K Endo, T Ida, A Moewes, GS Chang, SY Kim, CN Whang, None, Soft X-ray fluorescence measurements of polyimide films Thin Solid Films. ,vol. 357, pp. 91- 97 ,(1999) , 10.1016/S0040-6090(99)00423-X
Brent Millare, Marlon Thomas, Amy Ferreira, Hong Xu, Madison Holesinger, Valentine I. Vullev, Dependence of the Quality of Adhesion between Poly(dimethylsiloxane) and Glass Surfaces on the Conditions of Treatment with Oxygen Plasma Langmuir. ,vol. 24, pp. 13218- 13224 ,(2008) , 10.1021/LA801965S
Giovanni Marletta, Carmelo Oliveri, Giuseppe Ferla, Salvatore Pignataro, Esca and reels characterization of electrically conductive polyimide obtained by ion bombardment in the keV range Surface and Interface Analysis. ,vol. 12, pp. 447- 454 ,(1988) , 10.1002/SIA.740120802