The effect of substrate temperature on optoelectronic characteristics of surface-textured ZnO:Al films for micromorph silicon tandem solar cells

摘要: ZnO:Al films were deposited on the low cost soda lime glass substrates by d.c. magnetron sputtering from (2 wt.%) ceramic target. The electrical and optical properties of surface textured film at substrate temperatures room temperature, 200 °C, 300 400 °C studied. deposition rate etch was decreased with an increase implying that density increased. resistivity also decreased. showed about 2×10–4 ohm cm. refractive index 550 nm increased temperature. It is attributed to Al content in measured energy dispersive x-ray spectroscopy. morphologies, wet-chemical etching profiles, haze characteristics analyzed as a function largest craters highest values any other sample although over higher transmission lower than °C. In further temperature not efficient. So, small or pinholes which cause formed film. optimum high transmittance 90.3% 86.2% wavelength 800 nm, respectively. 70% 36% 1.59 (at.%), 2.1. 2.3×10–4ohm (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)