System and method of forming a split-gate flash memory cell
作者： Michael Wu , David Ho , Eugene Chu , Eric Chao , Fei Chen
DOI:
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摘要: A system and method for forming a split-gate flash memory cell is disclosed. In one example, semiconductor device includes: supplying substrate; floating gate with alternate etch passivation steps; control proximate to partially overlying the gate.
lens.org 参考文章(2)
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Hui-Chen Chu, Wen-Cheng Chien, Multi-layer spacer technology for flash EEPROM ,(2000)