Novel copper metal structure for the reduction of intra-metal capacitance
作者： Ting Cheong Ang , Victor Seng Keong Lim , Young-Way Teh
DOI:
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摘要: A new method and structure is provided for the creation of interconnect lines. The cross section lines invention, taken in a plane that perpendicular to longitudinal direction lines, triangle as opposed conventional square or rectangular
lens.org 参考文章(17)
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