Hydrogen gas sensor with self temperature compensation based on β-Ga2O3 thin film
作者： Shinji Nakagomi , Tsubasa Sai , Yoshihiro Kokubun
DOI: 10.1016/J.SNB.2013.01.020
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摘要: Field-effect hydrogen gas sensor devices with self-temperature compensation based on β-Ga 2 O 3 thin films were fabricated. A β-Ga 2 O 3 thin film was deposited on a sapphire …
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