Hybrid ceramic showerhead
作者： Karl F. Leeser , Ramkishan Rao Lingampalli , Mohamed Sabri
DOI:
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摘要: Various implementations of hybrid ceramic faceplates for substrate processing showerheads are provided. The showerhead may include an electrode embedded within the material faceplate, as well a pattern through-holes. be fully encapsulated with respect to In some implementations, heater element also faceplate. A DC voltage source electrically connected faceplate during use. easily removable from easy cleaning and replacement.
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