Ceramic showerhead with embedded rf electrode for capacitively coupled plasma reactor
作者： Karl Leeser , Douglas L. Keil , Cody Barnett , Edward Augustyniak , Ramkishan Rao Lingampalli
DOI:
关键词: Plenum space 、 Chemistry 、 Substrate (printing) 、 Ceramic 、 Electrode 、 Electrical conductor 、 Capacitively coupled plasma 、 Analytical chemistry 、 Optoelectronics
摘要: A showerhead assembly for a substrate processing system includes back plate connected to gas channel. face is adjacent first surface of the and diffusion surface. An electrode arranged in one or more conductors. plenum defined between fluid communication with The are made non-metallic material.
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