Integrated circuit memory devices having vertical transistor arrays therein and methods of forming same
作者： Augustin Jinwoo Hong , Kang L. Wang , Ji-Young Kim , Yong-jik Park , Jeong-hee Han
DOI:
关键词:
摘要: An integrated circuit device includes a transistor array having vertical stack of independently controllable gate electrodes therein. A first semiconductor channel region is provided, which extends on sidewall the electrodes. electrically insulating layer also between and Source drain regions are coupled to second ends region, respectively.
lens.org 参考文章(58)
Takuji Tanigami, Tetsuo Endoh, Fujio Masuoka, Takashi Yokoyama, Noboru Takeuchi, Semiconductor memory with gate at least partially located in recess defined in vertically oriented semiconductor layer ,(2002)
Fumitaka Arai, Riichiro Shirota, Makoto Mizukami, Semiconductor memory device and method of fabricating the same ,(2006)
Kyu-Charn Park, Won-Hong Lee, Sung-nam Chang, Flash memory device and method of making same ,(2002)
Sung-Won Yun, Sang-Wan Nam, ChiWeon Yoon, Donghyuk Chae, Nonvolatile Memory Devices, Channel Boosting Methods Thereof, Programming Methods Thereof, And Memory Systems Including The Same ,(2011)
Shinji Sato, Fumitoshi Ito, Fabricating and operating a memory array having a multi-level cell region and a single-level cell region ,(2009)
Ching-Nan Hsiao, Chi-Hui Lin, Ying-Cheng Chuang, Stack gate with tip vertical memory and method for fabricating the same ,(2004)
Wonseok Cho, Jin-Yong Oh, Woonkyung Lee, Sunil Shim, Jaehoon Jang, Jin-Soo Lim, Hansoo Kim, Jin-Sung Lee, Three-Dimensional Nonvolatile Memory Devices Having Sub-Divided Active Bars and Methods of Manufacturing Such Devices ,(2009)
Fumitaka Arai, Riichiro Shirota, Nonvolatile semiconductor memory and process of producing the same ,(2007)
Byoungkeun Son, Wonseok Cho, Sukhun Choi, Sunil Shim, Mingu Kim, Ju-Young Lim, Jae-Joo Shim, Jaehyoung Choi, Hansoo Kim, Youngsoo An, Jinho Kim, Semiconductor memory device comprising three-dimensional memory cell array ,(2010)
Won-Seok Cho, Jae-Hun Jeong, Sun-Il Shim, Jae-Hoon Jang, Han-soo Kim, Non-volatile memory device having vertical structure and method of operating the same ,(2010)