Etching anisotropy mechanisms lead to morphology-controlled silicon nanoporous structures by metal assisted chemical etching

摘要: The etching anisotropy induced by the morphology and rotation of silver particles controls silicon nanoporous structures, through various underlying complex mechanisms. level can be modulated controlling catalyst to obtain structures with straight pores, cone-shaped pores pyramid-shaped pores. In addition, helical are obtained taking advantage special anisotropic etching, which is revolution during process. An investigation metal assisted chemical will promote a deep understanding mechanism silicon, provide feasible approach fabricate Si morphologies.