Ablation depth control with 40 nm resolution on ITO thin films using a square, flat top beam shaped femtosecond NIR laser
作者： Hoon-Young Kim , Ji-Wook Yoon , Won-Suk Choi , Kwang-Ryul Kim , Sung-Hak Cho
DOI: 10.1016/J.OPTLASENG.2016.03.025
关键词:
摘要: Abstract We reported on the ablation depth control with a resolution of 40 nm indium tin oxide (ITO) thin film using square beam shaped femtosecond (190 fs) laser (λp=1030 nm). A slit is used to make square, flat top from Gaussian spatial profile laser. An was obtained single pulse irradiation at peak intensity 2.8 TW/cm2. The morphologies ablated area were characterized an optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS). Ablations rectangular types various sizes demonstrated ITO slits varying x–y axes. stereo structure approximately also fabricated successfully pulses different
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sci-hub.se 参考文章(23)
Ki-Won Seo, Yong Hyeon Kim, Jiyeon Choi, Han-Ki Kim, Hyo-Joong Kim, Direct laser patterning of transparent ITO–Ag–ITO multilayer anodes for organic solar cells Applied Surface Science. ,vol. 328, pp. 215- 221 ,(2015) , 10.1016/J.APSUSC.2014.12.017
Sang Jik Kwon, Patterning Properties of Indium?Tin Oxide Layer Depending on the Irradiation Conditions of Nd:YVO4 Laser Beam Japanese Journal of Applied Physics. ,vol. 47, pp. 7403- 7406 ,(2008) , 10.1143/JJAP.47.7403
Seongkuk Lee, Dongfang Yang, Suwas Nikumb, Femtosecond laser patterning of Ta0.1W0.9Ox/ITO thin film stack Applied Surface Science. ,vol. 253, pp. 4740- 4747 ,(2007) , 10.1016/J.APSUSC.2006.10.040
Ming-Fei Chen, Wen-Tse Hsiao, Yu-Sen Ho, Shih-Feng Tseng, Yu-Pin Chen, Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate Thin Solid Films. ,vol. 518, pp. 1072- 1078 ,(2009) , 10.1016/J.TSF.2009.06.063
Gediminas Račiukaitis, Marijus Brikas, Mindaugas Gedvilas, Tomas Rakickas, Patterning of indium–tin oxide on glass with picosecond lasers Applied Surface Science. ,vol. 253, pp. 6570- 6574 ,(2007) , 10.1016/J.APSUSC.2007.01.099
C. W. Cheng, W. C. Shen, C. Y. Lin, Y. J. Lee, J. S. Chen, Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses Applied Physics A. ,vol. 101, pp. 243- 248 ,(2010) , 10.1007/S00339-010-5810-1
O. Yavas, M. Takai, EFFECT OF SUBSTRATE ABSORPTION ON THE EFFICIENCY OF LASER PATTERNING OF INDIUM TIN OXIDE THIN FILMS Journal of Applied Physics. ,vol. 85, pp. 4207- 4212 ,(1999) , 10.1063/1.370332
Maziar Afshar, Martin Straub, Henning Voellm, Dara Feili, Karsten Koenig, Helmut Seidel, None, Sub-100 nm structuring of indium-tin-oxide thin films by sub-15 femtosecond pulsed near-infrared laser light. Optics Letters. ,vol. 37, pp. 563- 565 ,(2012) , 10.1364/OL.37.000563
Gediminas Račiukaitis, Marijus Brikas, Mindaugas Gedvilas, Gediminas Darčianovas, Patterning of ITO Layer on Glass with High Repetition Rate Picosecond Lasers Journal of Laser Micro Nanoengineering. ,vol. 2, pp. 1- 6 ,(2007) , 10.2961/JLMN.2007.01.0001
Chung-Wei Cheng, Cen-Ying Lin, High precision patterning of ITO using femtosecond laser annealing process Applied Surface Science. ,vol. 314, pp. 215- 220 ,(2014) , 10.1016/J.APSUSC.2014.06.174