Structure and elastic recovery of Cr-C:H films deposited by a reactive magnetron sputtering technique
作者： Wei Dai , Guosong Wu , Aiying Wang
DOI: 10.1016/J.APSUSC.2010.06.076
关键词:
摘要: Cr-containing hydrogenated amorphous carbon (Cr–C:H) films were deposited on silicon substrates using a DC reactive magnetron sputtering with Cr target in an Ar and C2H2 gas mixture. The composition, bond structure, mechanical hardness elastic recovery of the characterized energy dispersive X-ray spectroscopy, photoelectron Raman spectroscopy nano-indentation. film tribological behavior was also studied by ball-on-disc tribo-tester. results showed that at low flow rate (<10 sccm) presented feature composite Cr–C:H which consisted hard brittle chromium carbide phases hydrocarbon phase, thus led to observed poor wear resistance films. However, high (40 found present typical polymer-like a-C:H structure containing large amount sp 3
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A. C. Ferrari, J. Robertson, Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon Physical Review B. ,vol. 64, pp. 075414- ,(2001) , 10.1103/PHYSREVB.64.075414
J Robertson, Diamond-like amorphous carbon Materials Science & Engineering R-reports. ,vol. 37, pp. 129- 281 ,(2002) , 10.1016/S0927-796X(02)00005-0
O.A. Fouad, Abdul K Rumaiz, S. Ismat Shah, Reactive sputtering of titanium in Ar/CH4 gas mixture: Target poisoning and film characteristics Thin Solid Films. ,vol. 517, pp. 5689- 5694 ,(2009) , 10.1016/J.TSF.2009.02.119
V. Singh, J.C. Jiang, E.I. Meletis, Cr-diamondlike carbon nanocomposite films: Synthesis, characterization and properties Thin Solid Films. ,vol. 489, pp. 150- 158 ,(2005) , 10.1016/J.TSF.2005.04.104
I. Safi, Recent aspects concerning DC reactive magnetron sputtering of thin films: a review Surface & Coatings Technology. ,vol. 127, pp. 203- 218 ,(2000) , 10.1016/S0257-8972(00)00566-1
M. Lejeune, M. Benlahsen, R. Bouzerar, Stress and structural relaxation in amorphous hydrogenated carbon films Applied Physics Letters. ,vol. 84, pp. 344- 346 ,(2004) , 10.1063/1.1637447
Guangan Zhang, Pengxun Yan, Peng Wang, Youming Chen, Junyan Zhang, The preparation and mechanical properties of Al-containing a-C : H thin films Journal of Physics D. ,vol. 40, pp. 6748- 6753 ,(2007) , 10.1088/0022-3727/40/21/039
T Miura, Y Benino, R Sato, T Komatsu, Universal hardness and elastic recovery in Vickers nanoindentation of copper phosphate and silicate glasses Journal of The European Ceramic Society. ,vol. 23, pp. 409- 416 ,(2003) , 10.1016/S0955-2219(02)00154-1
M. Pandey, D. Bhatacharyya, D.S. Patil, K. Ramachandran, N. Venkatramani, A.K. Dua, Structural and optical properties of diamond like carbon films Journal of Alloys and Compounds. ,vol. 386, pp. 296- 302 ,(2005) , 10.1016/J.JALLCOM.2004.05.067
C. Corbella, M. Vives, A. Pinyol, E. Bertran, C. Canal, M.C. Polo, J.L. Andújar, Preparation of metal (W, Mo, Nb, Ti) containing a-C:H films by reactive magnetron sputtering Surface & Coatings Technology. ,vol. 177, pp. 409- 414 ,(2003) , 10.1016/J.SURFCOAT.2003.09.017