作者: Qianzhi Wang , Fei Zhou , Xiangdong Ding , Zhifeng Zhou , Chundong Wang
DOI: 10.1016/J.APSUSC.2013.01.027
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摘要: Abstract The CrN(C) coatings with different carbon contents were deposited using unbalanced magnetron sputtering via adjusting the target current, and their microstructure mechanical properties characterized Raman spectrum, X-ray photoelectron spectroscopy nano-indenter, respectively. water-lubricated tribological of against Si 3 N 4 balls investigated ball-on-disk tribometer. results showed that C content in increased gradually, peak intensity correlated to Cr 7 crystal phase became stronger when current increased. When was 1 A, hardness 22.5 GPa due formation amorphous CN x , a little had positive effect on water lubrication. On other hand, at 2–4 A exhibited lower deteriorated properties, presence major amount 2 O particles films.