Epitaxial Y‐Ba‐Cu‐O thin films on MgO deposited by high‐pressure reactive magnetron sputtering
作者： K. Tanabe , D. K. Lathrop , S. E. Russek , R. A. Buhrman
DOI: 10.1063/1.344151
关键词:
摘要: … Y-Ba-Cu-O thin films have been prepared on Mg0(100) substrates by rf reactive magnetron sputtering from a single ceramic target. By adopting high total pressures, typically 280 mTorr, …
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