Dispersion properties of aluminum nitride as measured by an optical waveguide technique

摘要: An aluminum nitride thin film on sapphire substrate was prepared by metal–organic chemical-vapor deposition for optical waveguide study. A rutile prism coupler employed to display the modes (N lines) with wavelengths of 632.8, 532.1, 514.5, and 488.0 nm. The refractive index thickness material were obtained prism–coupler measurement. parameters in dispersion equation determined curve fitting. attenuation evaluated scattering loss measurements using a fiber probe. coefficient α is range 1.5–2.1 cm−1 (5.4–7.6 dB cm−1), depending surface roughness sample different orders modes.