Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications

摘要: The advantage of using lead zirconate titanate (PbZr0.54Ti0.46O3) ceramics as an active material in nanoelectromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, integration within a technological process is limited by the difficulty structuring this with submicrometer resolution at wafer scale. In work, we develop specific patterning method based on optical lithography coupled dual-layer resist process. main objective to obtain sub-micrometer features lifting off 100-nm-thick PZT layer while preserving material's properties. A subsequent result developed ability stack several layers lateral few tens nanometers, which mandatory for fabrication NEMS integrated actuation and read-out capabilities.