Origins of Cracking in Highly Porous Anodically Grown Films on InP

作者: E. Harvey , D. N. Buckley , S. N. G. Chu , D. Sutton , S. B. Newcomb

DOI: 10.1149/1.1497401

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摘要: The nature of the surface films grown during anodization InP in an aqueous (NH 4 ) 2 S electrolyte has been investigated. previously reported cracking these is explicitly demonstrated to occur ex situ and not electrochemical treatment. have identified as In 3 are shown a columnar morphology. measured film thickness varies linearly with charge density passed, comparison between experimental measurements theoretical estimates for indicates porosity 70-80% film. Film attributed shrinkage drying highly porous does necessarily imply stress wet as-grown

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