Method for manufacturing a semiconductor pressure sensor
作者： Gabriele Barlocchi , Benedetto Vigna , Pietro Corona , Lorenzo Baldo , Flavio Francesco Villa
DOI:
关键词:
摘要: Method for manufacturing a semiconductor pressure sensor, wherein, in silicon substrate, trenches are dug and delimit walls; closing layer is epitaxially grown, that closes the at top forms suspended membrane; heat treatment performed so as to cause migration of walls form closed cavity underneath structures formed transducing deflection membrane into electrical signals.
google.co.uk 参考文章(22)
John J. Chapman, Qamar A. Shams, William T. Powers, Cryogenic, absolute, high pressure sensor ,(1996)
Reinhold Wahlich, James Moreland, Ammon Von Wilfried, Schmolke Ruediger, Brian Murphy, Production of a film or a layer of semiconductor material comprises producing structures of repeating recesses on the surface of a semiconductor material ,(2001)
Carlos H. Mastrangelo, Silicon-on-insulator capacitive surface micromachined absolute pressure sensor ,(1993)
Thomas A. Knecht, Roger L. Frick, Steven M. Bruesehoff, Differential pressure sensor ,(2001)
Benedetto Vigna, Paolo Ferrari, Flavio Villa, Integrated piezoresistive pressure sensor ,(1997)
Mitsuharu Takigawa, Susumu Sugiyama, Takashi Suzuki, Semiconductor pressure sensor and method of manufacturing the same ,(1986)
Tu Xiang-Zheng, Li Yun-Yan, Silicon diaphragm piezoresistive pressure sensor and fabrication method of the same ,(1991)
Alain Izadnegahdar, Michael Nagy, Brad Boggs, Horacio V. Estrada, Kevin Stark, James Siekkinen, Method of manufacturing a thin piezo resistive pressure sensor ,(2001)
Tsutomu Sato, Ichiro Mizushima, Shuichi Taniguchi, Keiichi Takenaka, Satoshi Shimonishi, Hisataka Hayashi, Masayuki Hatano, Kazuyoshi Sugihara, Yoshitaka Tsunashima, Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique Japanese Journal of Applied Physics. ,vol. 43, pp. 12- 18 ,(2004) , 10.1143/JJAP.43.12
David W. Burns, Henry Guckel, Sealed cavity semiconductor pressure transducers and method of producing the same ,(1986)