Small scale reactor for plasma processing of moving substrate web
作者： Hans J Griesser
DOI: 10.1016/0042-207X(89)90272-8
关键词:
摘要: A simple, inexpensive and versatile custom built reactor for experimental plasma deposition surface treatment is presented. The two outstanding features are a compact web conveyancing system with speed that variable in the range 0.15–6 m min−1, defined gas flow path. transport accepts rolls containing of order 100 flexible thin substrate reversible to enable multistep processing without breaking vacuum. provides stable uniform conditions extended coating polymer films by polymerization.
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