Composition–Depth profiling and interface analysis of surface coatings using ball cratering and the scanning auger microprobe†

摘要: The provision of accurate composition–depth profiles to depths > 1 μm is important in the characterization and investigation thick films, surface coatings, treatments many other technologically applications. At present, such are usually achieved by sequential ion bombardment analysis hence involve difficulties interpretation due non-uniform erosion surfaces under bombardment. In this paper a method obtaining depth described using ball-cratering device. employs rotating ball fashion well-defined spherical crater sample surface, width which can be accurately controlled. specimen then cleaned situ scanning beam for short period profile obtained either point-by-point down sloping sides wall or Auger line-scan techniques across crater. Coating–substrate interface also sputter–depth profiling at point on coating close exposed substrate. not only considerably faster than etching, but resulting has resolution. Composition–depth through nitrocarburized mild steel protective coatings presented illustrate usefulness technique.