Specular and diffuse reflectivity from thin films containing misfit dislocations

作者: T. Krentsel , C.J. Palmstrøm , P.F. Miceli , J. Weatherwax

DOI: 10.1016/0921-4526(95)00930-2

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摘要: Abstract We discuss the effects of misfit dislocations on specular and diffuse scattering observed in X-ray reflectivity at Bragg reflections thin films. Using experimental results from ErAs/GaAs(001), it is shown that an interfacial displacement-difference correlation function can be used to model dislocations. find correlation-length-limited for weak disorder whereas has a rotational character strong disorder. It suggested length arises elastic image field dislocation.

参考文章(15)
William D Nix, Theory of Dislocations ,(1968)
A. Gibaud, R. A. Cowley, D. F. McMorrow, R. C. C. Ward, M. R. Wells, High-resolution x-ray-scattering study of the structure of niobium thin films on sapphire. Physical Review B. ,vol. 48, pp. 14463- 14471 ,(1993) , 10.1103/PHYSREVB.48.14463
P. F. Miceli, C. J. Palmstro/m, X-ray scattering from rotational disorder in epitaxial films: An unconventional mosaic crystal Physical Review B. ,vol. 51, pp. 5506- 5509 ,(1995) , 10.1103/PHYSREVB.51.5506
P.M. Reimer, H. Zabel, C.P. Flynn, J.A. Dura, Structural characterization of Nb on sapphire as a buffer layer for MBE growth Journal of Crystal Growth. ,vol. 127, pp. 643- 645 ,(1993) , 10.1016/0022-0248(93)90701-W
A. Stierle, A. Abromeit, N. Metoki, H. Zabel, High resolution x‐ray characterization of Co films on Al2O3 Journal of Applied Physics. ,vol. 73, pp. 4808- 4814 ,(1993) , 10.1063/1.353846
P. F. Miceli, C. J. Palmstro/m, K. W. Moyers, X‐ray scattering study of lattice relaxation in ErAs epitaxial layers on GaAs Applied Physics Letters. ,vol. 58, pp. 1602- 1604 ,(1991) , 10.1063/1.105138
William H. Zachariasen, Theory of X-Ray Diffraction in Crystals ,(1968)
P. M. Reimer, H. Zabel, C. P. Flynn, J. A. Dura, Extraordinary alignment of Nb films with sapphire and the effects of added hydrogen Physical Review B. ,vol. 45, pp. 11426- 11429 ,(1992) , 10.1103/PHYSREVB.45.11426
S. K. Sinha, E. B. Sirota, S. Garoff, H. B. Stanley, X-ray and neutron scattering from rough surfaces Physical Review B. ,vol. 38, pp. 2297- 2311 ,(1988) , 10.1103/PHYSREVB.38.2297